Interface structure during ion-beam-induced epitaxial crystallization of silicon Back to all publications Publication date 1 January 1993 Reference J.S. Custer, A. Battaglia, M. Saggio and F. Priolo, Interface structure during ion-beam-induced epitaxial crystallization of silicon, Nucl. Instrum. Methods Phys. Res., Sect B 80/81, 881-885 (1993) Request this article
