High-temperature SiO2 decomposition at the SiO2/Si interface Back to all publications Publication date 1 January 1985 Reference R.M. Tromp, G.W. Rubloff, P. Balk, F.K. LeGoues and E.J. van Loenen, High-temperature SiO2 decomposition at the SiO2/Si interface, Phys.Rev.Lett. 55, 2332-2335 (1985) Request this article