Growth of uniform epitaxial CoSi2 films on Si (111) Back to all publications Publication date 1 January 1988 Reference A.E.M.J. Fischer, W.F.J. Slijkerman, K. Nakagawa, R.J. Smith, J.F. van der Veen and C.W.T. Bulle-Lieuwma, Growth of uniform epitaxial CoSi2 films on Si (111), J. Appl. Phys. 64, 3005-3013 (1988) Request this article
