| Reference |
J.R. Liefting, R. Schreutelkamp, W.X. Lu and F.W. Saris: Gettering of Cu at buried damage layers made by Si self implantation In: Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. /ed. J.A. Knapp, P. Borgesen and R.A. Zuhr, Materials Research Society, 1990. - pp. 641-644 |
