Gallium implantations in silicon, studied by proton backscattering, X-ray emission and Hall effect

Back to all publications

Publication date
Reference W.F. van der Weg, J.A. den Boer, F.W. Saris and D. Onderdelinden: Gallium implantations in silicon, studied by proton backscattering, X-ray emission and Hall effect In: European Conference on ion implantation : Reading september 7th-9th 1970, Peter Peregrinus Limited, 1970. - pp. 198-202