Ga delta-doping layers in silicon Back to all publications Publication date 1 January 1991 Reference P.M. Zagwijn, Y.N. Erokhin, W.F.J. Slijkerman, J.F. van der Veen, G.F.A. van de Walle, D.J. Gravesteijn and A.A. van Gorkum, Ga delta-doping layers in silicon, Appl. Phys. Lett. 59, 1461-1463 (1991) Request this article