Etching of silicon by SF6 induced by ion bombardment Back to all publications Publication date 1 January 1986 Reference D.J. Oostra, R.A. Haring, A.E. de Vries, F.H.M. Sanders and G.N.A. van Veen, Etching of silicon by SF6 induced by ion bombardment, Nucl. Instrum. Methods Phys. Res., Sect B 13, 556-560 (1986) Request this article