| Reference |
A.E. de Vries: Energy distributions of sputtered neutral particles by ion bombardment In: Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 /ed. P. Varga, G. Betz and F.P. Viehb, Institut für Allgemeine Physik, 1980. - pp. 256-279 |
