Emission spectroscopy and actinometry in a magnetized low pressure radio frequency discharge Back to all publications Publication date 1 January 1990 Reference A.D. Kuypers, A. Koch and H.J. Hopman, Emission spectroscopy and actinometry in a magnetized low pressure radio frequency discharge, J. Vac. Sci. Technol. A, 3736-3745 (1990)
