Displacement of group III, IV, V and VI impurities is Si by the analyzing beam

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Reference L.W. Wiggers and F.W. Saris: Displacement of group III, IV, V and VI impurities is Si by the analyzing beam In: Proceedings of the third International Conference on Ion Beam Analysis : Washington, D.C., June 27-July 1, 1977 /ed. E.A. Wolicki, J.W. Butler and P.A. Treado, North-Holland, 1978. - pp. 399-404