Dislocation formation in silicon implanted at different temperatures Back to all publications Publication date 1 January 1992 Reference J.R. Liefting, J.S. Custer, R. Schreutelkamp and F.W. Saris, Dislocation formation in silicon implanted at different temperatures, Mater. Sci. Eng. B 15, 173-186 (1992) Request this article
