Dislocation engineering for silicon devices

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Reference J.S. Custer, J.R. Liefting, R. Schreutelkamp, R.C.M. Wijburg, H. Wallinga and F.W. Saris: Dislocation engineering for silicon devices In: SSDM'92 : Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials, August 26-28, 1992, Tsukuba Center Building, Tsukuba, Japan, Publication Office, Business Center for Academic Societies Japan, 1992. - pp. 38-39