| Reference |
J.S. Custer, M.O. Thompson, D.C. Jacobson, J.M. Poate, S. Roorda, W.C. Sinke and F. Spaepen: Density measurements of ion implanted amorphous silicon In: Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. /ed. J.A. Knapp, P. Borgesen and R.A. Zuhr, Materials Research Society, 1990. - pp. 689-690 |
