Deep implants by channeling implantation

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Reference R. Schreutelkamp, F.W. Saris, J.F.M. Westendorp, R.E. Kaim, G.B. Odlum and K.T.F. Janssen, Deep implants by channeling implantation, Mater. Sci. Eng. B 2, 139-143 (1989)