Damage production at the surface of Si single crystals by 200 keV He+ bombardment Back to all publications Publication date 1 January 1979 Reference L.W. Wiggers, H.G. Koekkoek, A.H. Buth and F.W. Saris, Damage production at the surface of Si single crystals by 200 keV He+ bombardment, Radiat. Eff. 42, 77-81 (1979)
