Crystalline and electrical characteristics of silicon films deposited by ionized-cluster-beams Back to all publications Publication date 1 January 1980 Reference I. Yamada, F.W. Saris, T. Takagi, K. Matsubara, H. Takaoka and S. Ishiyama, Crystalline and electrical characteristics of silicon films deposited by ionized-cluster-beams, Jpn. J. Appl. Phys. 19, 181-184 (1980)
