Reference |
E.J. Puik, G.E. van Dorssen, M.J. van der Wiel, J. Verhoeven, G. van der Laan and H.A. Padmore, Characterization of the resolving power of a double multilayer monochromator in the energy range of 600-900eV, J. Vac. Sci. Technol. A 9, 3142-3148 (1991) |