Channeled implantation with a parallel scanned ion beam Back to all publications Publication date 1 January 1989 Reference J.F.M. Westendorp, R.E. Kaim, G.B. Odlum, R. Schreutelkamp, F.W. Saris and K.T.F. Janssen, Channeled implantation with a parallel scanned ion beam, Nucl. Instrum. Methods Phys. Res., Sect B 37/38, 357-360 (1989) Request this article
