Bombardment induced light emission from silicon, silicon nitride and silicon carbide surfaces Back to all publications Publication date 1 January 1977 Reference R.S. Bhattacharya, J.F. van der Veen, C.B.W. Kerkdijk and F.W. Saris, Bombardment induced light emission from silicon, silicon nitride and silicon carbide surfaces, Radiat. Eff. 32, 25-31 (1977)