Reference |
J.G. Bannenberg: Beam transport for ion implantation In: Low-energy Ion Beams, 1980 : Invited and Contributed Papers presented at the Second International Conference on Low-energy Ion Beams held at the University of Bath, 14-17 April 1980 /ed. I.H. Wilson and K.G. Stephens, Institute of Physics, 1980. - pp. 1-12 |