Avoiding preamorphization damage in MeV heavy ion-implanted silicon Back to all publications Publication date 1 January 1991 Reference R. Schreutelkamp, J.S. Custer, J.R. Liefting and F.W. Saris, Avoiding preamorphization damage in MeV heavy ion-implanted silicon, Appl. Phys. Lett. 58, 2827-2829 (1991) Request this article
