Automatic electron-beam deposition of multilayer soft x-ray coatings with laterally graded d-spacing Back to all publications Publication date 1 January 1986 Reference M.P. Bruijn, S. Chakraborty, H.W. van Essen, J. Verhoeven and M.J. van der Wiel, Automatic electron-beam deposition of multilayer soft x-ray coatings with laterally graded d-spacing, Opt. Eng. 25, 916-921 (1986) Request this article