Reference |
H.E. Roosendaal and J.-B. Sanders: Anisotropy effects in the energy and angular distribution of sputtered particles In: Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 /ed. P. Varga, G. Betz and F.P. Viehb, Institut für Allgemeine Physik, 1980. - pp. 302-311 |