A magnetic multipole reactor for high-flux reactive-ion etching Back to all publications Publication date 1 January 1988 Reference A.D. Kuypers, E.H.A. Granneman and H.J. Hopman, A magnetic multipole reactor for high-flux reactive-ion etching, J. Appl. Phys. 63, 1899-1903 (1988) Request this article
