A high current multichannel (MEQALAC) system for ion implantation Back to all publications Publication date 1 January 1987 Reference T. Weis, H. Klein, A. Schempp, P.W. van Amersfoort, F. Siebenlist and R.W. Thomae, A high current multichannel (MEQALAC) system for ion implantation, Nucl. Instrum. Methods Phys. Res., Sect B 24, 787-790 (1987) Request this article
