A 1 and 2 MV ion implantation facility Back to all publications Publication date 1 January 1987 Reference R. Koudijs, P. Dubbelman, W.H. Urbanus and J.G. Bannenberg, A 1 and 2 MV ion implantation facility, Nucl. Instrum. Methods Phys. Res., Sect B 21, 296-299 (1987) Request this article
