Velocity-dependent internal energy distributions of SiCI molecules, laser sputtered from silicon in a chlorine atmosphere

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Reference R. de Jonge, J.W.F. Majoor, K.W. Benoist and D. de Vries, Velocity-dependent internal energy distributions of SiCI molecules, laser sputtered from silicon in a chlorine atmosphere, Europhys. Lett. 2, 843-847 (1986)