Velocity-dependent internal energy distributions of SiCI molecules, laser sputtered from silicon in a chlorine atmosphere Back to all publications Publication date 1 January 1986 Reference R. de Jonge, J.W.F. Majoor, K.W. Benoist and D. de Vries, Velocity-dependent internal energy distributions of SiCI molecules, laser sputtered from silicon in a chlorine atmosphere, Europhys. Lett. 2, 843-847 (1986)