Two methods to improve the optical quality of Ni-C multilayer coatings: Ion bombardment and optimization of the substrate temperature

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Reference E.J. Puik, S.W.M. van de Ven, W.J.J. Wolfis, G.E. van Dorssen, M.J. van der Wiel, R.J.I.M. Koper, H. Zeijlemaker and J. Verhoeven: Two methods to improve the optical quality of Ni-C multilayer coatings: Ion bombardment and optimization of the substrate temperature In: Multilayer Optics for Advanced X-ray Applications : 22-23 July 1991, San Diego, California /ed. N.M. Ceglio, Bellingham: SPIE, 1992. - pp. 221-227