The energy distribution of molecules sputtered from frozen SF6

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Reference M. Szymonski, U. Paschke, R. Pedrys, R.A. Haring, H.E. Roosendaal, F.W. Saris and A.E. de Vries: The energy distribution of molecules sputtered from frozen SF6 In: Molecular ScatteringSymposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 /ed. P. Varga, G. Betz and F.P. Viehb, Institut für Allgemeine Physik, 1980. - pp. 312-319