Separating the contributions of hydrogen and structural relaxation to damage annealing in a-Si:H

Back to all publications

Publication date
Reference P.A. Stolk, A. Berntsen, F.W. Saris and W.F. van der Weg: Separating the contributions of hydrogen and structural relaxation to damage annealing in a-Si:H In: Amorphous Silicon Technology, 1993 : Symposium held April 13-16, 1993, San Francisco, California, U.S.A. /ed. E.A. Schiff, M.J. Thompson, A. Madan, K. Tanaka and P.G. Lecomber, Materials Research Society, 1993. - pp. 127-132