| Reference |
W.C. Sinke, P.K. Stout and F.W. Saris: Pre-annealing of TiN barriers in A1 metallization of silicon In: Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. /ed. J.M. Gibson and L.R. Dawson, Materials Research Society, 1985. - pp. 623-628 |
