Pre-amorphization damage in ion-implanted silicon Back to all publications Publication date 1 January 1991 Reference R. Schreutelkamp, J.S. Custer, J.R. Liefting, W.X. Lu and F.W. Saris, Pre-amorphization damage in ion-implanted silicon, Mater. Sci. Rep. 6, 275-366 (1991)
