Lattice location of low-z impurities in medium-z targets using ion-induced x-rays

Back to all publications

Publication date
Reference J.F. Chemin, I.V. Mitchell and F.W. Saris: Lattice location of low-z impurities in medium-z targets using ion-induced x-rays In: Ion Implantation in Semiconductors and Other Materials : [Proceedings of the Third International Conference on Ion Implantation in Semiconductors and Other Materials, Yorktown Heights, N.Y, 1972] /ed. B.L. Crowder, Plenum, 1973. - pp. 295-303