Ion-scattering analysis of semiconductor films

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Reference P.M.J. Marée and J.F. van der Veen: Ion-scattering analysis of semiconductor films In: Application of Ion Beams in Materials Science : Proceedings of the 12th International Symposium of Hosei University, Tokyo, Japan, Sept. 2-4, 1987 /ed. T. Sebe and Y. Yamamoto, Hosei University Press, 1988. - pp. 67-75