Ion bombardment of thin layers: the effect on the interface roughness and its x-ray reflectivity (invited) Back to all publications Publication date 1 January 1992 Reference E.J. Puik, M.J. van der Wiel, H. Zeijlemaker and J. Verhoeven, Ion bombardment of thin layers: the effect on the interface roughness and its x-ray reflectivity (invited), Rev. Sci. Instrum. 63, 1415-1419 (1992) Request this article
