Differences between ruby and Nd: YAG laser annealing of ion implanted silicon Back to all publications Publication date 1 January 1979 Reference Y. Tamminga, G.E.J. Eggermont, W.K. Hofker, D. Hoonhout, R. Garrett and F.W. Saris, Differences between ruby and Nd: YAG laser annealing of ion implanted silicon, Phys. Lett. A 69, 436-438 (1979)
