| Reference |
J.R. Liefting, V. Raineri, R. Schreutelkamp, J.S. Custer and F.W. Saris: Avoiding dislocation formation for B, P. and As implants in silicon In: Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. /ed. G.S. Was, L.E. Rehn and D.M. Follstaedt, Materials Research Society, 1992. - pp. 173-178 |
