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Analysis of Si thin films prepared by ion beam sputtering

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Reference R.S. Bhattacharya, C.B.W. Kerkdijk, D. Hoonhout and F.W. Saris: Analysis of Si thin films prepared by ion beam sputtering In: Proceedings of the 7th International Vacuum Congress and the 3rd International Conference on Solid Surfaces and the 3rd International Conference on Solid Surfaces of the International Union for Vacuum Science, Technique and Applications, Sept. 12 - 16, 19 /ed. R. Dozobrozemsky, F. Berger & Sohne, 1977. - pp. 1345-1347

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