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J.M. Poate, S. Coffa, D.C. Jacobson, A. Polman, J.A. Roth, G.L. Olson, S. Roorda, W.C. Sinke, J.S. Custer, M.O. Thompson, F. Spaepen and E. Donovan, Amorphous Si - the role of MeV implantation in elucidating defect and thermodynamic properties, Nucl. Instrum. Methods Phys. Res., Sect B 55, 533-543 (1991) |