Silicon waveguide

KLA-Tencor alpha-step 500

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The Alpha-step is a mechanical, stylus-based step profiler that can measure step heights with sub-angstrom resolution.

Specifications

  • 5-micron 60 degree angled radius tip   
    cleanroom stylus based surface profiler amsterdam nanocenter
  • 30 mg stylus force
  • Profile length max 10 mm
  • Maximum step height 2 mm
  • Vertical resolution sub angstrom
  • Horizontal resolution 100 angstrom
  • Max. sample size 158 mm diameter
  • Max. sample thickness 21 mm

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