KLA-Tencor alpha-step 500
The Alpha-step is a mechanical, stylus-based step profiler that can measure step heights with sub-angstrom resolution.
Specifications
- 5-micron 60 degree angled radius tip
- 30 mg stylus force
- Profile length max 10 mm
- Maximum step height 2 mm
- Vertical resolution sub angstrom
- Horizontal resolution 100 angstrom
- Max. sample size 158 mm diameter
- Max. sample thickness 21 mm